Numerical simulation of ISFET structures for biosensing devices with TCAD tools
نویسندگان
چکیده
منابع مشابه
Numerical simulation of ISFET structures for biosensing devices with TCAD tools
BACKGROUND Ion Sensitive Field Effect Transistors (ISFETs) are one of the primitive structures for the fabrication of biosensors (BioFETs). Aiming at the optimization of the design and fabrication processes of BioFETs, the correlation between technological parameters and device electrical response can be obtained by means of an electrical device-level simulation. In this work we present a numer...
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ژورنال
عنوان ژورنال: BioMedical Engineering OnLine
سال: 2015
ISSN: 1475-925X
DOI: 10.1186/1475-925x-14-s2-s3